Polymers for microelectronics : resists and dielectrics

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Bibliographic Information

Title
"Polymers for microelectronics : resists and dielectrics"
Statement of Responsibility
Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor
Publisher
  • American Chemical Society
Publication Year
  • 1994
Book size
24 cm

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Notes

"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."

Includes bibliographical references and indexes

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