Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California

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Bibliographic Information

Title
"Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California"
Statement of Responsibility
James A. Bondur ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm

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Notes

Includes bibliographical references and index

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