Extreme ultraviolet lithography : from the topical meeting, May 1-3, 1996, Boston, Massachusetts
Bibliographic Information
- Title
- "Extreme ultraviolet lithography : from the topical meeting, May 1-3, 1996, Boston, Massachusetts"
- Statement of Responsibility
- edited by Glenn D. Kubiak and Don R. Kania ; sponsored by Optical Society of America
- Publisher
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- Optical Society of America
- Publication Year
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- c1996
- Book size
- 28 cm
- Series Name / No
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- : pbk
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Notes
Includes bibliographical references (p. 222-232) and indexes
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Details 詳細情報について
-
- CRID
- 1130282269965028992
-
- NII Book ID
- BA52291180
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- ISBN
- 1557524351
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- LCCN
- 95072755
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- Web Site
- https://lccn.loc.gov/95072755
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Washington, D.C.
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- Classification
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- LCC: TS517.2
- DC21: 621.3815/31
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- Data Source
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- CiNii Books