Bibliographic Information
- Title
- "Lithography for VLSI"
- Statement of Responsibility
- edited by Norman G. Einspruch, R.K. Watts
- Publisher
-
- Academic Press
- Publication Year
-
- 1987
- Book size
- 24 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282269993756800
-
- NII Book ID
- BA01291241
-
- ISBN
- 0122341163
-
- LCCN
- 86032156
-
- Web Site
- https://lccn.loc.gov/86032156
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Orlando ; Tokyo
-
- Classification
-
- LCC: TK7874
- DC19: 621.381/73 s
- DC19: 621.381/73
-
- Subject
-
- LCSH: Integrated circuits -- Very large scale integration
- LCSH: Printed circuits
- LCSH: Lithography
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- Data Source
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- CiNii Books