Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan
Bibliographic Information
- Title
- "Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan"
- Statement of Responsibility
- editors, Russell C. Ellwanger, Shi-Qing Wang
- Publisher
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- Materials Research Society
- Publication Year
-
- c1996
- Book size
- 24 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
-
- CRID
- 1130282269996435328
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- NII Book ID
- BA35820037
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- ISBN
- 155899341X
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- LCCN
- 96209712
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- Web Site
- https://lccn.loc.gov/96209712
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- Text Lang
- en
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- Country Code
- us
-
- Title Language Code
- en
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- Place of Publication
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- Pittsburgh, Pa.
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- Classification
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- LCC: TK7874.76
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- Data Source
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- CiNii Books