Bibliographic Information
- Title
- "Proceedings of the fourth Symposium on Plasma Processing"
- Statement of Responsibility
- edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky ; [sponsored by] Dielectrics and Insulation and Electronics Divisions
- Publisher
-
- Electrochemical Society
- Publication Year
-
- c1983
- Book size
- 23 cm
- Other Title
-
- Plasma processing
Search this Book/Journal
Notes
Includes bibliographical references and indexes
"... was held during the Spring meeting of the Electrochemical Society, May 8-13, 1983 in San Francisco, Calif." -- on pref
- Tweet
Details 詳細情報について
-
- CRID
- 1130282270021578752
-
- NII Book ID
- BA84902513
-
- LCCN
- 83082041
-
- Web Site
- https://lccn.loc.gov/83082041
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Pennington, N.J.
-
- Classification
-
- DC: 530.44
-
- Subject
-
- Data Source
-
- CiNii Books
