Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Web Site CiNii 所蔵館 1館

書誌事項

タイトル
"Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia"
責任表示
Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]
出版者
  • SPIE
出版年月
  • c1999
書籍サイズ
28 cm

この図書・雑誌をさがす

注記

Includes bibliographical references and index

関連図書・雑誌

もっと見る

詳細情報 詳細情報について

ページトップへ