Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
書誌事項
- タイトル
- "Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia"
- 責任表示
- Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]
- 出版者
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- SPIE
- 出版年月
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- c1999
- 書籍サイズ
- 28 cm
この図書・雑誌をさがす
注記
Includes bibliographical references and index
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詳細情報 詳細情報について
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- CRID
- 1130282270181564416
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- NII書誌ID
- BA86012776
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- ISBN
- 0819434930
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- LCCN
- 00702718
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- Web Site
- https://lccn.loc.gov/00702718
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- 本文言語コード
- en
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- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Bellingham, Wash., USA
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- データソース種別
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- CiNii Books