Dry etch technology : 9-10-September 1991, San Jose, California

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Bibliographic Information

Title
"Dry etch technology : 9-10-September 1991, San Jose, California"
Statement of Responsibility
Deepak Ranadive, chair ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1992
Book size
28 cm

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Notes

"Part of a two-conference program on Microelectronic Manufacturing Science and Technology held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v

Includes bibliographical references and index

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