Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
Bibliographic Information
- Title
- "Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA"
- Statement of Responsibility
- Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c2006
- Book size
- 28 cm
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
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- CRID
- 1130282270216564096
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- NII Book ID
- BA86008316
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- ISBN
- 0819461997
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- LCCN
- 2006281963
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- Web Site
- https://lccn.loc.gov/2006281963
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Subject
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- LCSH: Integrated circuits -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Defects -- Analysis -- Congresses
- LCSH: Semiconductors -- Design and construction -- Congresses
- LCSH: Semiconductor wafers -- Defects -- Analysis -- Congresses
- LCSH: Microelectronics industry -- Quality control -- Congresses
- LCSH: Quality control -- Congresses
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- Data Source
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- CiNii Books