Planar test structures for characterizing impurities in silicon

HathiTrust 1976 Web Site CiNii Available at 2 libraries

Bibliographic Information

Title
"Planar test structures for characterizing impurities in silicon"
Statement of Responsibility
M. G. Buehler ... [et al.]
Publisher
  • U.S. G.P.O.
Publication Year
  • 1976
Book size
26 cm
Volume(Year)
  • 400-21

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Notes

Includes bibliographical references

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