Modeling of film deposition for microelectronic applications

CiNii Available at 20 libraries

Bibliographic Information

Title
"Modeling of film deposition for microelectronic applications"
Statement of Responsibility
edited by Stephen Rossnagel
Publisher
  • Academic Press
Publication Year
  • c1996
Book size
24 cm

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282270273368704
  • NII Book ID
    BA28758239
  • ISBN
    0125330227
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • San Diego ; Tokyo
  • Subject
  • Data Source
    • CiNii Books
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