Modeling of film deposition for microelectronic applications
CiNii
Available at 20 libraries
Bibliographic Information
- Title
- "Modeling of film deposition for microelectronic applications"
- Statement of Responsibility
- edited by Stephen Rossnagel
- Publisher
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- Academic Press
- Publication Year
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- c1996
- Book size
- 24 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282270273368704
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- NII Book ID
- BA28758239
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- ISBN
- 0125330227
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- San Diego ; Tokyo
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- Subject
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- LCSH: Thin films
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- Data Source
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- CiNii Books