Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A."
Statement of Responsibility
editors, B.J. Pawlak ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2006
Book size
24 cm

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Notes

"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282270403558528
  • NII Book ID
    BA7964760X
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, Pa.
  • Data Source
    • CiNii Books
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