Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
書誌事項
- タイトル
- "Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing"
- 責任表示
- edited by B.O. Kolbesen ... [et al.] ; [sponsored by the] Electronics Division
- 出版者
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- Electrochemical Society
- 出版年月
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- c1993
- 書籍サイズ
- 23 cm
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注記
Symposium held in Grenoble, France, on September 17th, 1993
Includes bibliographical references and indexes
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詳細情報 詳細情報について
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- CRID
- 1130282270433634304
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- NII書誌ID
- BA21147496
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- ISBN
- 1566770599
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- LCCN
- 93072861
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- Web Site
- https://lccn.loc.gov/93072861
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- 本文言語コード
- en
-
- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Pennington, NJ
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- データソース種別
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- CiNii Books
