Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California

CiNii Available at 5 libraries

Bibliographic Information

Title
"Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California"
Statement of Responsibility
Leonard J. Brillson, Fred H. Pollak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University ... [et al.]
Publisher
  • SPIE
Publication Year
  • c1990
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

  • CRID
    1130282270639525888
  • NII Book ID
    BA24466479
  • ISBN
    0819402222
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
Back to top