Rapid thermal and integrated processing II : symposium held April 12-15, 1993, San Francisco, Californai, U.S.A.
Bibliographic Information
- Title
- "Rapid thermal and integrated processing II : symposium held April 12-15, 1993, San Francisco, Californai, U.S.A."
- Statement of Responsibility
- editors, Jeffrey C. Gelpey ... [et al.]
- Publisher
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- Materials Research Society
- Publication Year
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- c1993
- Book size
- 24 cm
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Notes
"Papers ... presented at Symposium G, 'Rapid Thermal and Integrated Processing,' of the 1993 Spring Meeting of the Materials Research Society in San Francisco, California"--Pref
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282270689674368
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- NII Book ID
- BA21077572
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- ISBN
- 1558991999
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- LCCN
- 93021924
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- Web Site
- https://lccn.loc.gov/93021924
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pittsburgh, Pa.
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- Classification
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- LCC: TK7871.85
- DC20: 621.3815/2
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- Subject
-
- Data Source
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- CiNii Books