Microfabricated systems and MEMS VI : proceedings of the international symposium

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Bibliographic Information

Title
"Microfabricated systems and MEMS VI : proceedings of the international symposium"
Statement of Responsibility
editors, P.J. Hesketh ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2002
Book size
24 cm

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Notes

"... held at the 202nd Meeting of the Electrochemical society, May 12-17th, 2002, in Philadelphia, PA"--on pref

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282270758596096
  • NII Book ID
    BA59031337
  • ISBN
    1566773725
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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