Proceedings of the twelfth International Symposium on Plasma Processing

CiNii Available at 2 libraries

Bibliographic Information

Title
"Proceedings of the twelfth International Symposium on Plasma Processing"
Statement of Responsibility
editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions
Publisher
  • the Electrochemical Society, Inc.
Publication Year
  • c1998
Book size
24 cm
Other Title
  • Plasma processing XII

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282270783727616
  • NII Book ID
    BA43283625
  • ISBN
    1566771986
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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