Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007

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タイトル: "Frontiers of characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007"

責任表示: editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.]

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"All papers have been peer-reviewed."

Previous conferences entitled: Characterization and metrology for ULSI technology

Includes bibliographical references and indexes

System requirements for accompanying CD-ROM: Adobe Acrobat Reader, 7.0.1 or later