Plasma electronics : applications in microelectronic device fabrication

Web Site CiNii Available at 6 libraries

Bibliographic Information

Title
"Plasma electronics : applications in microelectronic device fabrication"
Statement of Responsibility
Toshiaki Makabe, Zoran Lj. Petrovic
Publisher
  • CRC Press
  • 2nd ed
Publication Year
  • c2015
Book size
24 cm
Series Name / No
  • : hardback

Search this Book/Journal

Notes

Includes bibliographical references and index

Details 詳細情報について

  • CRID
    1130282271107265280
  • NII Book ID
    BB18074449
  • ISBN
    9781482222050
  • LCCN
    2014016456
  • Web Site
    https://lccn.loc.gov/2014016456
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Boca Raton, FL
  • Classification
  • Data Source
    • CiNii Books
Back to top