- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
Plasma electronics : applications in microelectronic device fabrication
Bibliographic Information
- Title
- "Plasma electronics : applications in microelectronic device fabrication"
- Statement of Responsibility
- Toshiaki Makabe, Zoran Lj. Petrovic
- Publisher
-
- CRC Press
- 2nd ed
- Publication Year
-
- c2015
- Book size
- 24 cm
- Series Name / No
-
- : hardback
Search this Book/Journal
Notes
Includes bibliographical references and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130282271107265280
-
- NII Book ID
- BB18074449
-
- ISBN
- 9781482222050
-
- LCCN
- 2014016456
-
- Web Site
- https://lccn.loc.gov/2014016456
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Boca Raton, FL
-
- Data Source
-
- CiNii Books