Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain

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Bibliographic Information

Title
"Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain"
Statement of Responsibility
Carles Cané, Jung-Chih Chiao, Fernando Vidal Verdú, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectrónica (Spain) ... [et al.] ; published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2005
Book size
28 cm
Series Name / No
  • : pbk
Other Title
  • Smart sensors, actuators, and MEMS 2

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Notes

Includes bibliographical references and author index

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