Semiconductor micromachining

CiNii

Bibliographic Information

Title
"Semiconductor micromachining"
Statement of Responsibility
edited by S. A. Campbell and H. J. Lewerenz
Publisher
  • Wiley
Publication Year
  • c1998
Book size
24 cm.

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Details 詳細情報について

  • CRID
    1130282271168198528
  • NII Book ID
    BA35616198
  • ISBN
    0471980846
  • Text Lang
    en
  • Country Code
    uk
  • Title Language Code
    en
  • Place of Publication
    • Chichester
  • Data Source
    • CiNii Books
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