Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

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Bibliographic Information

Title
"Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany"
Statement of Responsibility
editors, B.O. Kolbesen ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2001
Book size
24 cm

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Notes

Includes bibliographic references and indexes

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Details 詳細情報について

  • CRID
    1130282271208196352
  • NII Book ID
    BA59030458
  • ISBN
    1566773636
  • LCCN
    2001092045
  • Web Site
    https://lccn.loc.gov/2001092045
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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