Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
Bibliographic Information
- Title
- "Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany"
- Statement of Responsibility
- editors, B.O. Kolbesen ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2001
- Book size
- 24 cm
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Notes
Includes bibliographic references and indexes
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Details 詳細情報について
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- CRID
- 1130282271208196352
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- NII Book ID
- BA59030458
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- ISBN
- 1566773636
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- LCCN
- 2001092045
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- Web Site
- https://lccn.loc.gov/2001092045
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Data Source
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- CiNii Books