Bibliographic Information
- Title
- "Semiconductor processing : a symposium"
- Statement of Responsibility
- sponsored by ASTM Committee F-1 on Electronics ... [et al.], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor
- Publisher
-
- ASTM
- Publication Year
-
- c1984
- Book size
- 24 cm
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Notes
"ASTM publication code number (PCN) 04-850000-46."
Includes bibliographies and index
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Details 詳細情報について
-
- CRID
- 1130282271328915200
-
- NII Book ID
- BA04324278
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- ISBN
- 0803104030
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- LCCN
- 84018476
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- Web Site
- https://lccn.loc.gov/84018476
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Philadelphia, PA
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- Classification
-
- LCC: TK7871.85
- DC19: 621.3815/2
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- Subject
-
- Data Source
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- CiNii Books
