Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005

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Bibliographic Information

Title
"Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005"
Statement of Responsibility
editors, Stephen J. Wukitch, Paul T. Bonoli
Publisher
  • American Institute of Physics
Publication Year
  • c2005
Book size
25 cm

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Details 詳細情報について

  • CRID
    1130282271335194880
  • NII Book ID
    BA76781752
  • ISBN
    0735402760
  • LCCN
    2005932081
  • Web Site
    https://lccn.loc.gov/2005932081
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Melville, N.Y
  • Data Source
    • CiNii Books
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