Characterization and metrology for ULSI technology : 2000 international conference, Gaithersburg, Maryland, 26-29 June 2000

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Bibliographic Information

Title
"Characterization and metrology for ULSI technology : 2000 international conference, Gaithersburg, Maryland, 26-29 June 2000"
Statement of Responsibility
editors David G. Seiler ... [et al.]
Publisher
  • American Institute of Physics
Publication Year
  • c2001
Book size
28 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282271404605312
  • NII Book ID
    BA52082125
  • ISBN
    156396967X
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • New York
  • Data Source
    • CiNii Books
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