Dielectric material integration for microelectronics

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Bibliographic Information

Title
"Dielectric material integration for microelectronics"
Statement of Responsibility
editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]
Publisher
  • Electrochemical Society
Publication Year
  • c1998
Book size
23 cm

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Notes

"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface

Includes bibliographical references and index

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