Bibliographic Information
- Title
- "Dielectric material integration for microelectronics"
- Statement of Responsibility
- editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]
- Publisher
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- Electrochemical Society
- Publication Year
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- c1998
- Book size
- 23 cm
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Notes
"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282271500896512
-
- NII Book ID
- BA43172781
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- ISBN
- 1566771978
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- LCCN
- 99159837
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- Web Site
- https://lccn.loc.gov/99159837
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Classification
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- LCC: TK7872.D53
- DC21: 621.381
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- Data Source
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- CiNii Books