Control of mobile-ion contamination in oxidation ambients for MOS device processing

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Bibliographic Information

Title
"Control of mobile-ion contamination in oxidation ambients for MOS device processing"
Statement of Responsibility
Santos Mayo, Richard Y. Koyama and Thomas F. Leedy
Publisher
  • U.S. Dept. of Commerce, National Bureau of Standards
Publication Year
  • 1978
Book size
27 cm

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Notes

Includes bibliographical references

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Details 詳細情報について

  • CRID
    1130282271528925952
  • NII Book ID
    BB1906575X
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • [Washington, D.C.]
  • Data Source
    • CiNii Books
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