Bibliographic Information
- Title
- "Characterization in silicon processing"
- Statement of Responsibility
- editor, Yale Strusser ; consulting editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick
- Publisher
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- Butterworth-Heinemann
- Manning
- Publication Year
-
- c1993
- Book size
- 25 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282271537286400
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- NII Book ID
- BA23536910
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- ISBN
- 0750691727
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- LCCN
- 93022784
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- Web Site
- https://lccn.loc.gov/93022784
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
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- Place of Publication
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- Boston
- Greenwich
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- Classification
-
- LCC: QC611.8.S5
- DC20: 620.1/93
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- Subject
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- LCSH: Silicon
- LCSH: Electric conductors
- LCSH: Semiconductor films
- LCSH: Surface chemistry
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- Data Source
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- CiNii Books