Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA

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Bibliographic Information

Title
"Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA"
Statement of Responsibility
Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c2004
Book size
28 cm

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Details 詳細情報について

  • CRID
    1130282271665277824
  • NII Book ID
    BA67810543
  • ISBN
    0819450669
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
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