Fabrication engineering at the micro- and nanoscale

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Bibliographic Information

Title
"Fabrication engineering at the micro- and nanoscale"
Statement of Responsibility
Stephen A. Campbell
Publisher
  • Oxford University Press
  • 3rd ed
Publication Year
  • 2008
Book size
24 cm
Series Name / No
  • : pbk

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Notes

Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed

Includes bibliographical references and index

HTTP:URL=http://www.loc.gov/catdir/toc/ecip0714/2007013450.html Information=Table of contents only

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