Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Arthur H. Heuer, S. Jushua Jacobs
Publisher
  • Materials Research Society
Publication Year
  • c1999
Book size
24 cm

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130282271736891776
  • NII Book ID
    BA44647909
  • ISBN
    1558994521
  • LCCN
    99051976
  • Web Site
    https://lccn.loc.gov/99051976
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, Pa.
  • Data Source
    • CiNii Books
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