Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Bibliographic Information
- Title
- "Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A."
- Statement of Responsibility
- editors, Arthur H. Heuer, S. Jushua Jacobs
- Publisher
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- Materials Research Society
- Publication Year
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- c1999
- Book size
- 24 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282271736891776
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- NII Book ID
- BA44647909
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- ISBN
- 1558994521
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- LCCN
- 99051976
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- Web Site
- https://lccn.loc.gov/99051976
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Warrendale, Pa.
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- Data Source
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- CiNii Books