Proceedings of the Symposium on Silicon Nitride Thin Insulating Films
Bibliographic Information
- Title
- "Proceedings of the Symposium on Silicon Nitride Thin Insulating Films"
- Statement of Responsibility
- edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions
- Publisher
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- Electrochemical Society
- Publication Year
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- c1983
- Book size
- 23 cm
- Other Title
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- Silicon nitride thin insulating films
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Notes
Includes bibliographical references and index
"... held May 11-13, 1983 in San Francisco, California" -- on pref
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Details 詳細情報について
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- CRID
- 1130282271746554112
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- NII Book ID
- BA84901871
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- LCCN
- 83082039
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- Web Site
- https://lccn.loc.gov/83082039
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Classification
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- LCC: TK7872.T55
- DC19: 621.381/7
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- Subject
-
- Data Source
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- CiNii Books