Proceedings of the Symposium on Silicon Nitride Thin Insulating Films

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Bibliographic Information

Title
"Proceedings of the Symposium on Silicon Nitride Thin Insulating Films"
Statement of Responsibility
edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1983
Book size
23 cm
Other Title
  • Silicon nitride thin insulating films

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Notes

Includes bibliographical references and index

"... held May 11-13, 1983 in San Francisco, California" -- on pref

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