Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology
Bibliographic Information
- Title
- "Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology"
- Statement of Responsibility
- editors, C.S. Murthy, G.R. Srinivasan, S.T. Dunham ; Electronics Division [of the Electrochemical Society]
- Publisher
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- Electrochemical Society
- Publication Year
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- c1999
- Other Title
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- Process physics and modeling in semiconductor technology
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Notes
"This Proceedings Volume contains papers that were presented at the Fifth International Symposium on Process Physics and Modeling in Semiconductor Technology held in Seattle, Washington, May 5-6, 1999, as part of the Spring [195th] Meeting of the Electrochemical Society."--Preface
Includes bibliographic references and indexes
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Details 詳細情報について
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- CRID
- 1130282271773279744
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- NII Book ID
- BA43707528
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- ISBN
- 1566772249
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- LCCN
- 99062162
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- Web Site
- https://lccn.loc.gov/99062162
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, New Jersey
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- Classification
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- LCC: TK7871.85
- DC21: 621.3815/2
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- Data Source
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- CiNii Books