Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

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Bibliographic Information

Title
"Analytical and diagnostic techniques for semiconductor materials, devices and processes 7"
Statement of Responsibility
editors, D. K. Schroder ... [et al.]. ; sponsoring divisions, Electronics and Photonics, Dielectric Science & Technology
Publisher
  • Electrochemical Society
Publication Year
  • c2007
Book size
23 cm
Series Name / No
  • : CD-ROM
Other Title
  • Analytical Techniques for Semiconductor Materials and Process Characterization
  • ALTECH

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Notes

"... was part of the Fall 2007 Electrochemical Society Meeting in Washington, DC, held on October 7-12, 2007."--on pref

"... also contains a CD-ROM with the papers of the ALTECH 07 symposium Analytical Techniques for Semiconductor Materials and Process Characterization V, held as part of the Solid State Device Research Conference (ESSDERC) 2007 in Munich, Germany on September 13-14, 2007."--on pref

Includes bibliographical references and indexes

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