Microelectronics processing : inorganic materials characterization

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Bibliographic Information

Title
"Microelectronics processing : inorganic materials characterization"
Statement of Responsibility
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society
Publisher
  • American Chemical Society
Publication Year
  • 1986

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Notes

Includes bibliographies and indexes

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