Integrated circuit metrology : May 4-5, 1982, Arlington, Virginia

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Bibliographic Information

Title
"Integrated circuit metrology : May 4-5, 1982, Arlington, Virginia"
Statement of Responsibility
Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1982
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographical references and indexes

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