Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

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書誌事項

タイトル
"Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices"
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edited by Orlando Auciello and Jürgen Engemann
出版者
  • Kluwer
出版年月
  • c1993
書籍サイズ
25 cm

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注記

"Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad indsheim, Germany, September 21 - October 2, 1992"--T.p. verso

Published in cooperation with NATO Scientific Affairs Division

Includes index

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