Materials for microlithography : radiation-sensitive polymers

Name: Materials for microlithography : radiation-sensitive polymers
Author: Thompson, L. F., Willson, C. G. (C. Grant), Fréchet, J. M. J., American Chemical Society. Division of Polymeric Materials : Science and Engineering, American Chemical Society. Division of Polymer Chemistry, American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)

Thompson, L. F., Willson, C. G. (C. Grant), Fréchet, J. M. J., American Chemical Society. Division of Polymeric Materials : Science and Engineering, American Chemical Society. Division of Polymer Chemistry, American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)

Materials for microlithography : radiation-sensitive polymers

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Thompson, L. F.
Willson, C. G. (C. Grant)
Fréchet, J. M. J.
American Chemical Society. Division of Polymeric Materials : Science and Engineering
American Chemical Society. Division of Polymer Chemistry
American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)

Bibliographic Information

Title: "Materials for microlithography : radiation-sensitive polymers"

Statement of Responsibility: L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984

Publisher

The Society

Publication Year

1984

Book size: 24 cm

Other Title

Radiation-sensitive polymers

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