Bibliographic Information
- Title
- "Semiconductor manufacturing technology"
- Statement of Responsibility
- Chue San Yoo
- Publisher
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- World Scientific
- Publication Year
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- c2008
- Book size
- 24 cm
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Notes
Includes bibliographical references (p. 453-464) and index
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Details 詳細情報について
-
- CRID
- 1130282272160903296
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- NII Book ID
- BA90114190
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- ISBN
- 9789812568236
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- LCCN
- 2008299033
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- Web Site
- https://lccn.loc.gov/2008299033
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- Text Lang
- en
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- Country Code
- si
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- Title Language Code
- en
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- Place of Publication
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- Singapore
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- Subject
-
- Data Source
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- CiNii Books