Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.
CiNii
Available at 7 libraries
Bibliographic Information
- Title
- "Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A."
- Statement of Responsibility
- sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley ; editor, Eliot K. Broadbent ; associate editors, Robert S. Blewer ... [et al]
- Publisher
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- Materials Research Society
- Publication Year
-
- c1987
- Book size
- 24 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282272173355136
-
- NII Book ID
- BA33720519
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- ISBN
- 0931837669
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Pittsburgh, Pa
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- Data Source
-
- CiNii Books
