Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Bibliographic Information

Title
"Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
Statement of Responsibility
edited by Jerzy Ruzyllo, Richard E. Novak ; [sponsored by the] Electronics and Dielectric Science and Technology Divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1992
Book size
23 cm

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Notes

"Held at the Electrochemical Society Fall Meeting in Phoenix, Arizona, October 14-18, 1992"--P. iii

Includes bibliographical references and indexes

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