Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Bibliographic Information
- Title
- "Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
- Statement of Responsibility
- edited by Jerzy Ruzyllo, Richard E. Novak ; [sponsored by the] Electronics and Dielectric Science and Technology Divisions
- Publisher
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- Electrochemical Society
- Publication Year
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- c1992
- Book size
- 23 cm
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Notes
"Held at the Electrochemical Society Fall Meeting in Phoenix, Arizona, October 14-18, 1992"--P. iii
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282272247627136
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- NII Book ID
- BA18281537
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- ISBN
- 1566770122
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- LCCN
- 92071447
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- Web Site
- https://lccn.loc.gov/92071447
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ (10 South Main St., Pennington 08534-2896)
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- Classification
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- LCC: TK7871.85
- DC20: 621.381/52
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- Subject
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- Data Source
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- CiNii Books