Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California

Web Site CiNii Available at 3 libraries

Bibliographic Information

Title
"Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California"
Statement of Responsibility
Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1985
Book size
28 cm
Series Name / No
  • pbk.

Search this Book/Journal

Notes

Includes bibliographies and index

Related Books

See more

Details 詳細情報について

Back to top