Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands
Bibliographic Information
- Title
- "Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands"
- Statement of Responsibility
- Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.]
- Publisher
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- SPIE-the International Society for Optical Engineering
- Publication Year
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- c1987
- Book size
- 28 cm
- Series Name / No
-
- pbk.
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Notes
Includes bibliographies and index
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Details 詳細情報について
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- CRID
- 1130282272309306112
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- NII Book ID
- BA1243085X
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- ISBN
- 089252846X
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- LCCN
- 87061561
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- Web Site
- https://lccn.loc.gov/87061561
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7874
- DC19: 621.381/73
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- Data Source
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- CiNii Books