Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands

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Bibliographic Information

Title
"Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands"
Statement of Responsibility
Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.]
Publisher
  • SPIE-the International Society for Optical Engineering
Publication Year
  • c1987
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographies and index

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