Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A."
Statement of Responsibility
editors, Shyam P. Murarka ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1998
Book size
24 cm

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Notes

Includes bibliographical references and index

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