Materials & process integration for MEMS

CiNii Available at 2 libraries

Bibliographic Information

Title
"Materials & process integration for MEMS"
Statement of Responsibility
edited by Francis E.H. Tay
Publisher
  • Kluwer Academic Publishers
Publication Year
  • c2002
Book size
25 cm
Other Title
  • Materials and process integration for MEMS

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282272410871040
  • NII Book ID
    BA63288519
  • ISBN
    1402071752
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Boston
  • Data Source
    • CiNii Books
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