Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California
Bibliographic Information
- Title
- "Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California"
- Statement of Responsibility
- James Bondur, Alan R. Reinberg, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering
- Publisher
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- The Society
- Publication Year
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- c1990
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282272451620224
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- NII Book ID
- BA24466399
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- ISBN
- 0819402214
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- LCCN
- 89043521
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- Web Site
- https://lccn.loc.gov/89043521
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7871.85
- DC20: 621.381/52
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- Data Source
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- CiNii Books
