Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess
Publisher
  • Materials Research Society
Publication Year
  • c1990
Book size
24 cm

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Notes

Includes bibliographical references and index

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