Proceedings of the Fifth Symposium on Plasma Processing

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Bibliographic Information

Title
"Proceedings of the Fifth Symposium on Plasma Processing"
Statement of Responsibility
edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky
Publisher
  • Electrochemical Society
Publication Year
  • c1985
Book size
23 cm
Other Title
  • Plasma processing
  • Proceedings of the 5th Symposium on Plasma Processing

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Notes

Includes bibliographical references and indexes

"... held during the fall meeting of the Electrochemical Society, Inc., October 7-14, 1984 in New Orleans, La." -- on pref

Sponsored by: Dielectrics & Insulation and Electronics Divisions

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