Bibliographic Information
- Title
- "Proceedings of the Fifth Symposium on Plasma Processing"
- Statement of Responsibility
- edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky
- Publisher
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- Electrochemical Society
- Publication Year
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- c1985
- Book size
- 23 cm
- Other Title
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- Plasma processing
- Proceedings of the 5th Symposium on Plasma Processing
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Notes
Includes bibliographical references and indexes
"... held during the fall meeting of the Electrochemical Society, Inc., October 7-14, 1984 in New Orleans, La." -- on pref
Sponsored by: Dielectrics & Insulation and Electronics Divisions
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Details 詳細情報について
-
- CRID
- 1130282272610806912
-
- NII Book ID
- BA84917678
-
- LCCN
- 85070593
-
- Web Site
- https://lccn.loc.gov/85070593
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Pennington, NJ
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- Classification
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- LCC: TK7871.85
- DC19: 621.3815/2
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- Subject
-
- Data Source
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- CiNii Books