Advanced processing and characterization of semiconductors III : 22-24 January 1986, Los Angeles, California

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Bibliographic Information

Title
"Advanced processing and characterization of semiconductors III : 22-24 January 1986, Los Angeles, California"
Statement of Responsibility
Devendra K. Sadana, Michael I. Current, chairmen/editors ; presented in cooperation with American Association of Physicists in Medicine ... [et al.]
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1986
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographies and index

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