Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
Bibliographic Information
- Title
- "Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A."
- Statement of Responsibility
- editors, James C. Sturm ... [et al.]
- Publisher
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- Materials Research Society
- Publication Year
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- c1988
- Book size
- 24 cm
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Notes
Includes bibliographies and indexes
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Details 詳細情報について
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- CRID
- 1130282272631031680
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- NII Book ID
- BA0514719X
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- ISBN
- 0931837758
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- LCCN
- 88012739
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- Web Site
- https://lccn.loc.gov/88012739
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pittsburgh, Pa.
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- Classification
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- LCC: TK7871.85
- DC19: 621.3815/22
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- Data Source
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- CiNii Books